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​The vacuum beaming™ Assemblies

4-axis manual control of the beam path under vacuum. Yaw, pitch, rotation and position adjustments are possible with a highly stable flexure mount. Supports up to 3” substrates. Flange type: KF 50. Pressure down to 10^-6 mbar.

Vaccum Beaming; Beam propagation, folding, steering and routing under vacuum or in gas under pressure of up to 20 bar
Vaccum Beaming; Beam propagation, folding, steering and routing under vacuum or in gas under pressure of up to 20 bar
Vaccum Beaming; Beam propagation, folding, steering and routing under vacuum or in gas under pressure of up to 20 bar
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